Mass flow controllers
30 November 2017
Alicat Scientific’s MCE mass flow controllers have been integrated into MDC Vacuum Products’ XpressStick MFC Gas Stick.
With precision control of gas flows of up to 20SLPM and onboard display, Alicat’s MCE provides gas programming functionality to the gas connection module, which links pressurized gas inputs to vacuum chambers.
The Alicat MCE accurately controls gas flow rates as low as 0-0.5 sccm full scale or as high as 0-20 slpm full scale. With 20 to 50 millisecond control response times to setpoint changes, the MCE improves vacuum coating end products and helps eliminate target poisoning.
The all-in-one design of the XpressStick MFC gas stick eliminates complex hardware specification in processes which include a combination of specialty gases, pressure, precise regulation, and vacuum. Its easy programming and precise gas control system allows users to go from bottle to process in one simple step. Designed to meet ultra-high purity process requirements, the XpressStick is also offered in a stainless steel model for corrosive environments.
With the MCE’s zero warm up time, the XpressStick is ready to control process flows in just one second, with real time mass flow, volumetric flow, absolute pressure and temperature data, fully compensated for temperature and pressure. The gas module is programmed directly through the MCE’s integrated display, with easy changes to gas type using the on-board gas calibrations.