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Click here for the latest compressed air news !

Bearing up to special demands
September 1st 2007

Without sacrificing bearing accuracy, Kaydon Corporation Reali-Slim bearings can be optimised to minimise friction, outgassing, contamination and even wear. The company specialises in meeting the specific demands of semiconductor manufacturing.

Custom Reali-Slim bearings were chosen by Applied Materials UK in Horsham for a gripper arm assembly on its Quantum X ion implant machine for the processing of silicon wafers. This is a single wafer, high current implanter using fixed beam technology. The gripper assembly loads the wafer into the implant chamber and the role of the Kaydon bearings is to support the rotation of the gripper.

UK factory representative for KAYDON is R. A.

Rodriguez with whom Applied Materials UK worked on this project.

The bearing selected was a customised Type X 4-point contact bearing that accepts radial, thrust and moment loading. It was supplied with a flanged outer race for fixing to the gripper arm plate.

AISI 440C stainless steel races and balls were a must as the application called for contaminant-free, no-lube operation.

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