Film measure
January 1st 2007

Mikropack's easy-to-use, benchtop spectroscopic ellipsometer is designed for thin film measurement.

The SpecEL-2000-VIS is suitable for semi-transparent flat samples such as wafers and glass plates. It provides fast, precise measurement of layer thickness, refractive index, absorption and components ratio at the touch of a button.

The company says the device is half the price of standard spectroscopic ellipsometry equipment. The all-in-one system has a footprint of just 52 by 33 by 24cm. It has an integrated light source, spectrometer and two polarisers and comes with a 32-Bit Windows PC featuring easy-to-use software. It measures polarised light reflected from the surface of the substrate to determine the thickness and refractive index of the material as a function of wavelength.