Single axis MEMS (Micro-Electro-
Mechanical Systems) capacitive
accelerometers have been launched by
Kistler Instruments for use where
high-precision, low-frequency
measurements and compact, robust
construction are absolute
requirements. The new accelerometers
use Kistler’s K-Beam technology to
deliver precision, sensitivity and low
noise characteristics.

The Type 8315A series is made up
of six models with measurement rages
from ±2 to ±200g with a frequency
response of zero to 1000 Hz (5%) in a
compact design with a footprint of
just 25.4 mm. The MEMS variable
capacitance sensing element consists
of a small inertial mass located
between two parallel plates. Deflection
of the inertial mass under acceleration
causes a proportional change in the
capacitance of the sensing element.

An integrated analogue signal
conditioner converts this change to a
proportional voltage output. The
thermal stability of the MEMS
construction provides reliable
performance within the operating
temperature range of -55 to 125°C.