The new MarSurf UD 120 from
Mahr can generate both surface and
contour measurements in a single
pass. Designed for economy, even at
high tolerances, this compact system,
which is based on the MarSurf LD
120 system, provides high accuracy
measurements over a wide measuring
range in nanometre resolutions.

The MarSurf UD 120’s drive unit
enables lengths from 0.1 to 120mm
to be traversed at drive speeds between
0.1 and 2mm/s, with a glass scale in
the X-direction allowing automatic
positioning. Probe motion is sensed
by an optical measuring system
based on a rocker-arm principle that
has the stylus tip on one end and an
interferometer on the other.

Movement is registered by photo
diodes and evaluated electronically.

The probe measuring range is 10-
20mm; the unit’s standard LD A14-
102/60° diamond probe yields a Zaxis
resolution of 2nm and a residual
Rz0 value of 60nm.