Capacitive accelerometer

New from Kistler Instruments is a single axis, high sensitivity, capacitive accelerometer for measuring static acceleration or low-level, lowfrequency vibration.

The ServoK-Beam accelerometer has high resolution, good frequency response and insensitivity to thermal transients and transverse acceleration making it suitable for a range of applications, from modal analysis of large structures and vehicle dynamics to measuring seismic effects on structures during earthquakes and aerospace ground testing.

The measurement range of ±3g, wide static and dynamic frequency response from 0 to 500Hz and ultralow noise of 4µgrms below 100Hz are combined with sensitivity of 1200mV/g, high immunity to thermal transients 1500gpk shock rating and low transverse acceleration. The three terminal, variable capacitance sensor is made by a bulk Micro Electro- Mechanical System process. Sensing element and conditioning electronics are integrated into an hermetically sealed titanium housing with a mass of 95g; an anodised housing provides ground isolation. The unit is powered by bipolar supply between ±6 and ±12V DC.